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Microstructure, residual stress, and fracture of sputtered TiN films

2013/03/21 by Liqiang Zhang, Huisheng Yang, Xiaolu Pang +2
Engineering · Materials Science · #Advanced ceramic materials synthesis #Diamond and Carbon-based Materials Research #Metal and Thin Film Mechanics

paper · doi:10.1016/j.surfcoat.2013.03.009

openalex publication_date 2013/03/21 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/31

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