2024/01/30 by Aman R. Agrawal, Jack Manley, Agrawal, A. R. +5 · 1 citation
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Applied Physics (physics.app-ph) #FOS: Physical sciences #Geophysics and Sensor Technology #Mechanical and Optical Resonators #Optics (physics.optics) #Quantum Physics (quant-ph)
paper · pdf · doi:10.48550/arxiv.2401.16695
openalex publication_date 2024/01/30 · openalex created_date 2024/02/01 · openalex updated_date 2026/07/28
We have realized a suspended, high-reflectivity focusing metamirror (f≈ 10 cm, R ≈ 99%) by non-periodic photonic crystal patterning of a Si3N4 membrane. The design enables construction of a stable, short (L = 30 μm), high-finesse (F>600) membrane cavity optomechanical system using a single plano dielectric end-mirror. We present the metamirror design, fabrication process, and characterization of its reflectivity using both free space and cavity-based transmission measurements. The mirror's effective radius of curvature is inferred from the transverse mode spectrum of the cavity. In combination with phononic engineering and metallization, focusing membrane mirrors offer a route towards high-cooperativity, vertically-integrated cavity optomechanical systems with applications ranging from precision force sensing to hybrid quantum transduction.