2013/08/13 by Yi Zou, Zou, Yi, Danning Zhang +25
Engineering · Physics and Astronomy · #FOS: Physical sciences #Nanofabrication and Lithography Techniques #Optics (physics.optics) #Photonic Crystals and Applications #Photonic and Optical Devices
paper · pdf · doi:10.48550/arxiv.1308.2749
openalex publication_date 2013/08/13 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
This paper reports a versatile, roll-to-roll and backend compatible technique for the fabrication of high-index-contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low-temperature chalcogenide glass film deposition and resist-free single-step thermal nanoimprint to process low-loss (1.6 dB/cm), sub-micron single-mode waveguides with a smooth surface finish using simple contact photolithography. Using this approach, the first chalcogenide glass micro-ring resonators are fabricated by thermal nanoimprint. The devices exhibit an ultra-high quality-factor of 400,000 near 1550 nm wavelength, which represents the highest value reported in chalcogenide glass micro-ring resonators. Furthermore, sub-micron nanoimprint of chalcogenide glass films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates.