2020/05/13 by Abhishek Srivastava, Srivastava, Abhishek, Baibhab Chatterjee +9
Engineering · #Advanced MEMS and NEMS Technologies #FOS: Electrical engineering #Microwave Engineering and Waveguides #Radio Frequency Integrated Circuit Design #Signal Processing (eess.SP) #Systems and Control (eess.SY) #electronic engineering #information engineering
paper · pdf · doi:10.48550/arxiv.2005.07138
openalex publication_date 2020/05/13 · openalex created_date 2020/05/21 · openalex updated_date 2026/07/28
Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the manifestation of the small ratio of motional capacitance to static capacitance in the resonators. This work provides a general solution to overcome the problem of relatively high static capacitance at mmWave frequencies and presents analysis and design techniques for achieving extremely low phase noise and a very high figure-of-merit (FoM) in an on-chip MEMS resonator based mmWave oscillator. The proposed analysis and techniques are validated with design and simulation of a 30 GHz oscillator with MEMS resonator having quality factor of 10,000 in 14 nm GF technology. Post layout simulation results show that it achieves a phase noise of -132 dBc/Hz and FoM of 217 dBc/Hz at offset of 1 MHz.