2005/03/02 by B. Satpati, Biswarup Satpati, P.V. Satyam +7
Engineering · Materials Science · Physics and Astronomy · #Electron and X-Ray Spectroscopy Techniques #FOS: Physical sciences #Ion-surface interactions and analysis #Materials Science (cond-mat.mtrl-sci) #Semiconductor materials and interfaces #cond-mat.mtrl-sci
paper · pdf · doi:10.48550/arxiv.cond-mat/0503030
10 pages, 5 figures, presented in INDO-US workshop on Nano-scale Materials: From Science to Technology; will be published by Nova Publishing Company, USA
arxiv created 2005/03/02 · openalex publication_date 2005/03/02 · arxiv updated 2009/12/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
High resolution transmission electron microscopy (HRTEM) and Rutherford backscattering spectrometry (RBS) are used to study the ion induced effects in Au, Ag nanostructures grown on Si and thermally grown SiO2 substrates. Au and Ag films (~2 nm) are prepared by thermal evaporation under high vacuum condition at room temperature (RT). These films were irradiated with MeV Au ions also at RT. Very thin films of Au and Ag deposited on silicon substrates (with native oxide) form isolated nano-island structures due to the non-wetting nature of Au and Ag. Ion irradiation causes embedding of these nanoislands into the substrate. For Ag nanoislands with diameter 15 - 45 nm, the depth of the embedding increases with ion fluence and the nano particles are fully submerged into Si and SiO2 substrate at a fluence of 5*1014 ions /cm2 without any mixing. Au nanoparticles (diameter 6 - 20 nm), upon ion irradiation, forms embedded gold-silicide in the case of Si substrate and show lack of mixing and silicide formation in the case of SiO2 substrate system.