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Simulation-Based Investigation of Curtain Gas Effect on Metal-Organic Chemical Vapor Deposition Growth of Two-Dimensional Transition Metal Dichalcogenides

2025/07/07 by Feng Zhang, Fanyu Zeng, Daichi Kozawa +1
#2D materials #Chemical Vapor Deposition #Finite Element Method

paper · doi:10.48505/nims.4769

Abstract

CRYSTAL GROWTH & DESIGN. 24 [14] (2024)6001-6006

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