Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation

2025/09/05 by Tang, Rui-Ji, Shu-Xia Zhao, Zhao, Shu-Xia +2
Engineering · Materials Science · #Plasma Diagnostics and Applications #Particle accelerators and beam dynamics #High voltage insulation and dielectric phenomena

paper · pdf · doi:10.48550/arxiv.2509.04728

Abstract

In this paper, the discharge structure of an Ar and SF inductively coupled plasma at the low pressure is investigated by mean of a fluid simulation at the quasi cold ion approximation with the room temperature magnitude.

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