2013/03/13 by D. Benzeggouta, Benzeggouta, D., I. Vickridge +1
Engineering · Materials Science · Physics and Astronomy · #Electron and X-Ray Spectroscopy Techniques #FOS: Physical sciences #Integrated Circuits and Semiconductor Failure Analysis #Ion-surface interactions and analysis #Materials Science (cond-mat.mtrl-sci) #cond-mat.mtrl-sci
paper · pdf · doi:10.48550/arxiv.1303.3171
arxiv created 2013/03/13 · openalex publication_date 2013/03/13 · arxiv updated 2013/03/14 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
This handook is intended as a resource for scientists who use Ion Beam Analysis (IBA), to help them understand and minimise beam damage induced during the analysis. The basic physics of ion-matter interactions, from the perspectve of damage induced by the beam during Ion Beam Analysis, is presented at a level suitable for post-graduate students. The specificities of damage induced in widely used IBA techniques such as Backscattering Spectrometry (RBS), Nuclear Reaction Analysis (NRA), Elastic Recoil Detection Analysis (ERDA) and Particle-Induced X-ray Emission (PIXE) are presented, followed by sections on damage induced during analysis of different classes of materials such as metals, semiconductors or polymers. A comprehensive bibliography is included.