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Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit

2024/06/28 by Sean P. Bommer, Christopher Panuski, Bommer, Sean P. +13 · 1 citation
Engineering · Physics and Astronomy · #Applied Physics (physics.app-ph) #FOS: Physical sciences #Nanofabrication and Lithography Techniques #Optics (physics.optics) #Photonic Crystals and Applications

paper · doi:10.48550/arxiv.2406.20010

openalex publication_date 2024/06/28 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

Photonic crystal cavities (PhCCs) can confine optical fields in ultra-small volumes, enabling efficient light-matter interactions for quantum and non-linear optics, sensing and all-optical signal processing. The inherent nanometric tolerances of micro-fabrication platforms can induce cavity resonant wavelength shifts two-orders of magnitude larger than cavity linewidths, prohibiting fabrication of arrays of nominally identical devices. We address this device variability by fabricating PhCCs as releasable pixels that can be transferred from their native substrate to a receiver where ordered micro-assembly can overcome the inherent fabrication variance. We demonstrate the measurement, binning and transfer of 119 PhCCs in a single session, producing spatially ordered arrays of PhCCs, sorted by resonant wavelength. Furthermore, the rapid in-situ measurement of the devices enables measurements of the PhCCs dynamic response to the print process for the first time, showing plastic and elastic effects in the seconds to hours range.

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