Rare-earth Doped Amorphous Silicon Microdisk and Microstadium Resonators with Emission at 1550nm

2007/11/09 by David S. L. Figueira, D. S. L. Figueira, Figueira, D. S. L. +3
Engineering · Materials Science · Physics and Astronomy · #FOS: Physical sciences #Optics (physics.optics) #Photonic Crystals and Applications #Photonic and Optical Devices #Silicon Nanostructures and Photoluminescence #physics.optics

paper · pdf · doi:10.48550/arxiv.0711.1549

18 pages, 4 figures. Submitted

arxiv created 2007/11/09 · openalex publication_date 2007/11/09 · arxiv updated 2009/12/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

Microdisks and microstadium resonators were fabricated on erbium doped amorphous hydrogenated silicon (a-Si:H<Er>) layers sandwiched in air and native SiO2 on Si substrates. Annealing condition is optimized to allow large emission at 1550 nm for samples with erbium concentrations as high as 1.02x10²0 atoms/cm3. Near field scanning optical microscopy shows evidences of the simultaneous presence of bow-tie and diamond scars. These modes indicate the high quality of the resonators and the potentiality for achieving amorphous silicon microcavity lasers.

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