Ripple topography on thin ZnO films by grazing and oblique incidence ion sputtering

2011/02/16 by Subhro Bhattacharjee, Bhattacharjee, S., Prasanta Karmakar +7
Engineering · #FOS: Physical sciences #Ion-surface interactions and analysis #Mesoscale and Nanoscale Physics (cond-mat.mes-hall)

paper · pdf · doi:10.48550/arxiv.1102.3309

openalex publication_date 2011/02/16 · openalex created_date 2019/06/27 · openalex updated_date 2026/07/28

Abstract

We have investigated the formation and growth of nano sized ripple topography on ZnO thin films by 10 keV O1+ bombardment at impact angles of 80° and 60°, varying the ion fluence from 5times10¹6 to 1×10¹8 ions/cm2. At 800 the ripples are oriented along the ion beam direction whereas at 600 it is perpendicular to the ion beam direction. The developed ion induced structures are characterized by Atomic Force Microscopy (AFM) and the alignment, variation of rms roughness, wavelength and correlation length of the structures are discussed with the existing model and basic concept of ion surface interaction.

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