Data for publication: Monolithic 4H-SiC nanomechanical resonators with high intrinsic quality factors

2025/01/29 by André Hochreiter, Hochreiter, A., P. Bredol +7
Engineering · Physics and Astronomy · #Advanced Fiber Optic Sensors #Advanced MEMS and NEMS Technologies #FOS: Physical sciences #Mechanical and Optical Resonators #Mesoscale and Nanoscale Physics (cond-mat.mes-hall)

paper · pdf · doi:10.48550/arxiv.2501.17960

openalex publication_date 2025/01/29 · openalex created_date 2025/02/01 · openalex updated_date 2026/07/28

Abstract

These are experimental data that form the base of our publication: Monolithic 4H-SiC nanomechanical resonators with high intrinsic quality factors

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