2023/01/31 by Ji Qi, Qi, Ji, Wei Ding +9
Engineering · #3D IC and TSV technologies #Advancements in Photolithography Techniques #Applied Physics (physics.app-ph) #FOS: Physical sciences #Nanofabrication and Lithography Techniques #Optics (physics.optics)
paper · pdf · doi:10.48550/arxiv.2302.00066
openalex publication_date 2023/01/31 · openalex created_date 2023/02/04 · openalex updated_date 2026/07/28
To improve the light extraction efficiency of organic light emitting diodes (OLEDs), we developed a novel substrate, i.e., a metamaterial based flat Moire micro-lens array formed using double nanoimprint, termed Mlens-array, consisting of a hexagonal moiré pattern pillar array. By choosing a low refractive index dielectric material for the pillar array and a high refractive index dielectric material for the layer capped on top of the pillar array, we fabricated the Mlens-array behaving as a conventional convex optical micro-lens array. The Mlens-array was fabricated on a 4-inch wafer-size glass substrate by double-cycle compositional nanoimprint lithography (NIL) which is easy for achieving high throughput fabrication in large-scale. Applying the Mlens-array substrate in a typical green-emitting OLED, the light extraction efficiency was enhanced by over 100% (2.08-fold) compared to a control device fabricated on the conventional planar glass substrate.