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Chemical Characterization of Aerosol Particles Using On-chip Photonic\n Cavity Enhanced Spectroscopy

2018/05/30 by Robin Singh, Singh, Robin, Danhao Ma +7
Engineering · Physics and Astronomy · #Advanced Fiber Optic Sensors #Applied Physics (physics.app-ph) #Biological Physics (physics.bio-ph) #Chemical Physics (physics.chem-ph) #FOS: Physical sciences #Mechanical and Optical Resonators #Photonic and Optical Devices

paper · pdf · doi:10.48550/arxiv.1806.06669

openalex publication_date 2018/05/30 · openalex created_date 2022/10/03 · openalex updated_date 2026/07/28

Abstract

We demonstrate the chemical characterization of aerosol particles with\non-chip spectroscopy using a photonic cavity enhanced silicon nitride (Si3N4)\nracetrack resonator-based sensor. The sensor operates over a broad and\ncontinuous wavelength range, showing cavity enhanced sensitivity at specific\nresonant wavelengths. Analysis of the relative change in the quality factor of\nthe cavity resonances successfully yields the absorption spectrum of the\naerosol particles deposited on the resonators. Detection of N-methyl\naniline-based aerosol detection in the Near InfraRed (NIR) range of 1500 nm to\n1600 nm is demonstrated. Our aerosol sensor spectral data compares favorably\nwith that from a commercial spectrometer, indicating good accuracy. The small\nsize of the device is advantageous in remote, environmental, medical and\nbody-wearable sensing applications.\n

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