Electron tennis driven by radio-frequency electric fields in low-pressure plasma sources

2020/09/30 by Máté Vass, Vass, Mate, Aranka Derzsi +5
Engineering · #FOS: Physical sciences #Laser Design and Applications #Laser-induced spectroscopy and plasma #Plasma Diagnostics and Applications #Plasma Physics (physics.plasm-ph)

paper · pdf · doi:10.48550/arxiv.2009.14664

openalex publication_date 2020/09/30 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Complex features inside the sheaths are identified in several physical quantities, which are sculptured by the trajectories of the bouncing electrons under the influence of the spatio-temporally varying electric field. A method is developed to explain the generation of the various features as a function of surface processes and to identify the trajectories of electrons of different origin.

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