2013/03/26 by Tianxiang Chen, Haijun Yang, Chen, Tianxiang +6
Computer Science · Engineering · Physics and Astronomy · #Advanced Fiber Optic Sensors #Advanced Measurement and Metrology Techniques #FOS: Physical sciences #Instrumentation and Detectors (physics.ins-det) #Optical measurement and interference techniques #physics.ins-det
paper · pdf · doi:10.48550/arxiv.1303.6477
openalex publication_date 2013/03/26 · arxiv created 2013/12/06 · arxiv updated 2013/12/09 · openalex created_date 2016/06/24 · openalex updated_date 2026/08/04
In this paper, we report high-precision absolute position measurement performed with frequency scanned interferometry (FSI). We reported previously on measurement of absolute distance with FSI [1]. Absolute position is determined by several related absolute distances measured simultaneously. The achieved precision of 2-dimensional measurements is better than 1 micron, and in 3-dimensional measurements, the precision on X and Y is confirmed to be below 1 micron, while the confirmed precision on Z is about 2 microns, where the confirmation is limited by the lower precision of the moving stage in Z direction.