2012/05/22 by Sébastien Hentz, Hentz, Sébastien, Laurent Duraffourg +4
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #FOS: Physical sciences #Geophysics and Sensor Technology #Instrumentation and Detectors (physics.ins-det) #Mechanical and Optical Resonators #physics.ins-det
paper · pdf · doi:10.48550/arxiv.1205.4860
arxiv created 2012/05/22 · openalex publication_date 2012/05/22 · arxiv updated 2012/05/23 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
This paper shows the effect of scaling silicon accelerometers down from MEMS to NEMS. It models both electronics and Brownian noise sources for both capacitive and resonant devices, and computes the minimum detectable signal attainable. Computed results are remarkably close to published experimental results. It shows the relatively low influence of the quality factor and of the beam width in the resonant case. Different scaling rules are investigated, and it appears that resonant sensing may satisfy some new application requirements, in particular for critical dimensions below a few hundreds of nm, when it is better resolved than capacitive sensing.