2022/03/31 by Junxiang Cai, Yiyun Wang, Cai, Junxiang +11
Engineering · Medicine · #FOS: Physical sciences #Medical Physics (physics.med-ph) #Nanoplatforms for cancer theranostics #Photoacoustic and Ultrasonic Imaging #Ultrasound Imaging and Elastography
paper · pdf · doi:10.48550/arxiv.2203.16806
openalex publication_date 2022/03/31 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
This paper reports an aluminum nitride (AlN) multi-frequency piezoelectric micromachined ultrasound transducers (MF-PMUT) array for photoacoustic (PA) imaging, where the broadened bandwidth is beneficial to improve imaging resolution. Specifically, PMUT based on micro-electromechanical systems (MEMS) technology is suitable for PA endoscopic imaging of blood vessels and bronchi due to its miniature size. More importantly, AlN is a non-toxic material, which makes it harmless for biomedical applications. In this work, a MF-PMUT array are designed and fabricated for PAI. The device's vibration mode impedance and bandwidth are analyzed. The MF-PMUT sensor provides a wider bandwidth (65%) signal detection, which increases the resolution of PAI compared with traditional PMUT. We conduct an experiment on agar sample to present sensor's performance in images' axial resolution.