2025/09/03 by Springer, Matthias, Düsing, Jan, Koch, Jürgen +2
#600 #670 #Acousto-optic #Fast beam deflection #Konferenzschrift #Micro machining strategies
paper · doi:10.15488/19498
Acousto-optical deflectors (AOD) enable laser pulse-synchronous beam deflection up to the MHz range, which can deviate from the usual path control and raster scan strategies. Where the small working field of the AODs is not sufficient, a combination with a galvo scanner or an axis system can be used. Laser micromachining with modern ultrashort pulse lasers with a high pulse repetition rate is increasingly faced with the challenge of applying the laser power to the workpiece without too much heat remaining locally in the surface. AOD-based beam deflection can help here by quickly distributing the laser pulses on the surface, which is equivalent to a locally reduced laser pulse repetition rate without reducing the laser's repetition rate. We provide an overview of the technology and present examples of innovative machining strategies resulting from the use of acousto-optical laser beam deflection.