Lattice strain and tilt mapping in stressed Ge microstructures using X-ray Laue micro-diffraction and rainbow filtering

2016/03/21 by Samuel Tardif, Tardif, Samuel, Alban Gassenq +31
Engineering · Materials Science · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #FOS: Physical sciences #Magnetic Properties and Applications #Magnetic properties of thin films #Materials Science (cond-mat.mtrl-sci)

paper · pdf · doi:10.48550/arxiv.1603.06370

openalex publication_date 2016/03/21 · openalex created_date 2022/10/02 · openalex updated_date 2026/07/28

Abstract

Micro-Laue diffraction and simultaneous rainbow-filtered micro-diffraction\nwere used to measure accurately the full strain tensor and the lattice\norientation distribution at the sub-micron scale in highly strained, suspended\nGe micro-devices. A numerical approach to obtain the full strain tensor from\nthe deviatoric strain measurement alone is also demonstrated and used for\nfaster full strain mapping. We performed the measurements in a series of\nmicro-devices under either uniaxial or biaxial stress and found an excellent\nagreement with numerical simulations. This shows the superior potential of Laue\nmicro-diffraction for the investigation of highly strained micro-devices.\n

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