Global optimization of an encapsulated Si/SiO₂ L3 cavity for ultra-high quality factor

2019/11/08 by J. P. Vasco, Vincenzo Savona, Vasco, J. P. +1
Engineering · Physics and Astronomy · #FOS: Physical sciences #Optical Network Technologies #Optics (physics.optics) #Photonic Crystals and Applications #Photonic and Optical Devices

paper · pdf · doi:10.48550/arxiv.1911.03361

openalex publication_date 2019/11/08 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

We optimize a silica-encapsulated silicon L3 photonic crystal cavity for ultra-high quality factor by means of a global optimization strategy, where the closest holes surrounding the cavity are varied to minimize out-of-plane losses. We find an optimal value of Q_c=4.33×10⁷, thus setting a new record for encapsulated low-index-contrast photonic crystal cavities. We also address the effects of structural imperfections on our optimal cavity design and predict an averaged Q_c in the 2 million regime for state-of-the-art silicon fabrication tolerances.

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