Suspended silicon waveguides for long-wave infrared wavelengths

2017/11/09 by Jordi Soler Penadés, Alejandro Sánchez‐Postigo, Penadés, J. Soler +27
Engineering · Materials Science · Physics and Astronomy · #FOS: Physical sciences #Optical Coatings and Gratings #Optics (physics.optics) #Photonic Crystals and Applications #Photonic and Optical Devices

paper · pdf · doi:10.48550/arxiv.1711.03468

openalex publication_date 2017/11/09 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/01

Abstract

In this paper we report suspended silicon waveguides operating at a wavelength of 7.67 mm with a propagation loss of 3.1 ? 0.3 dB/cm. To our knowledge this is the first demonstration of low loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a subwavelength grating that provides lateral optical confinement, while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low loss waveguide bends and s-bends.

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