2019/12/27 by В. Н. Самойлов, Samoilov, V. N., A. I. Musin +2
Engineering · Materials Science · Physics and Astronomy · #Diamond and Carbon-based Materials Research #FOS: Physical sciences #Ion-surface interactions and analysis #Materials Science (cond-mat.mtrl-sci) #Metal and Thin Film Mechanics #Nuclear Physics and Applications
paper · pdf · doi:10.48550/arxiv.1912.12035
openalex publication_date 2019/12/27 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
Ejection of atoms from (001) surfaces of a number of real and model single\ncrystals is studied by molecular dynamics computer simulation. Evolution of\nenergy distributions of sputtered atoms with polar and azimuthal angle\nresolution with increase of atomic number of the target is investigated. For\nlow energies the maximum of overfocused atoms is more sensitive to the increase\nof atomic number of the target than the maximum of focused atoms. Evolution of\nthe polar angular distributions of sputtered atoms with energy and azimuthal\nangle resolution with increase of atomic number of the target is also studied.\nMaxima of focused and overfocused atoms are very sensitive to the increase of\natomic number of the target. The observed maxima shifts are due to stronger\nblocking effect with increase of atomic number of the target.\n Keywords: single crystal sputtering, ejection of atoms from a surface, energy\ndistribution of sputtered atoms, polar angular distribution, focused atoms,\noverfocused atoms, molecular dynamics simulation method.\n