2025/08/30 by Yao, Ziqian, Vakhtang Chuluhadze, Zihuan Liu +11 · 1 citation
Engineering · Medicine · #Acoustic Wave Resonator Technologies #Applied Physics (physics.app-ph) #FOS: Physical sciences #Ultrasonics and Acoustic Wave Propagation #Ultrasound Imaging and Elastography
paper · pdf · doi:10.48550/arxiv.2509.00600
openalex publication_date 2025/08/30 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium niobate (LN). Opposite in-plane polarizations in the piezoelectric film stack are employed to enable efficient lateral field excitation of the flexural mode. Thanks to its high piezoelectric coefficient and low dielectric loss, the X-cut LN exhibits high figure of merits (FoMs) as both sensors and transducers. The fabricated PMUT demonstrates an out-of-plane mode near 1 MHz with an electromechanical coupling of 3.6%. Laser Doppler vibrometry further validates the finite element analysis, showing a peak center displacement of 340 pm/V. These results establish bi-layer P3F LN PMUTs as a promising platform for compact and high-performance ultrasonic transducers. Future work will focus on theoretical analysis, modeling of the measured data, improving the design of the transducer topology, and mitigating feedthrough effects.