2018/10/15 by Claudia Beatriz López-Posadas, Yaxu Wei, López-Posadas, C. B. +9
Biochemistry, Genetics and Molecular Biology · Materials Science · #2D Materials and Applications #Advanced biosensing and bioanalysis techniques #Applied Physics (physics.app-ph) #FOS: Physical sciences #Graphene research and applications #Materials Science (cond-mat.mtrl-sci)
paper · pdf · doi:10.48550/arxiv.1811.00114
openalex publication_date 2018/10/15 · openalex created_date 2018/11/09 · openalex updated_date 2026/07/28
Real-time monitoring is essential for understanding and eventually precise controlling of the growth of two dimensional transition-metal dichalcogenides (2D TMDCs). However, it is very challenging to carry out such kind of studies on chemical vapor deposition (CVD). Here, we report the first real time in-situ study on the CVD growth of the 2D TMDCs. More specifically, CVD growth of molybdenum disulfide (MoS2) monolayer on sapphire substrates has been monitored in-situ using differential transmittance spectroscopy (DTS). The growth of the MoS2 monolayer can be precisely followed by looking at the evolution of the characteristic optical features. Consequently, a strong correlation between the growth rate of MoS2 monolayer and the temperature distribution in the CVD reactor has been revealed. Our result demonstrates the great potential of the real time in-situ optical spectroscopy for the realization of the precisely controlled growth of 2D semiconductor materials.