2013/04/04 by Matthias Imboden, Imboden, Matthias, Han Han +13
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #FOS: Physical sciences #Mechanical and Optical Resonators #Mesoscale and Nanoscale Physics (cond-mat.mes-hall) #Molecular Junctions and Nanostructures #Nanofabrication and Lithography Techniques #Nanowire Synthesis and Applications #Soft Condensed Matter (cond-mat.soft)
paper · pdf · doi:10.48550/arxiv.1304.1334
openalex publication_date 2013/04/04 · openalex created_date 2022/10/01 · openalex updated_date 2026/07/28
We present a micro-electromechanical system (MEMS) based method for the\nresist free patterning of nano-structures. Using a focused ion beam (FIB) to\ncustomize larger MEMS machines, we fabricate apertures as small as 50 nm on\nplates that can be moved with nanometer precision over an area greater than\n20x20 \μm2. Depositing thermally evaporated gold atoms though the apertures\nwhile moving the plate results in the deposition of nanoscale metal patterns.\nAdding a shutter only microns above the aperture, enables high speed control of\nnot only where but also when atoms are deposited. Using a shutter, different\nsized apertures can be selectively opened and closed for nano-structure\nfabrication with features ranging from nano- to micrometers in scale. The\nability to evaporate materials with high precision, and thereby fabricate\ncircuits and structures in situ, enables new kinds of experiments based on the\ninteractions of a small number of atoms and eventually even single atoms.\n