2010/08/19 by Fabretti, Savio, Thomas, Patrick, Meinert, Markus +1
#FOS: Physical sciences #Superconductivity (cond-mat.supr-con)
paper · doi:10.48550/arxiv.1008.3325
We fabricated superconducting MgB2 thin films on (001) MgO substrates. The samples were prepared by magnetron rf and dc co-sputtering on heated substrates. They were annealed ex-situ for one hour at temperatures between 450°C and 750°C. We will show that the substrate temperature during the sputtering process and the post annealing temperatures play a crucial role in forming MgB2 superconducting thin films. We achieved a critical onset temperature of 27.1K for a film thickness of 30nm. The crystal structures were measured by x-ray diffraction.