2005/12/29 by Michael R. Geller, Joel B. Varley, Geller, Michael R. +1
Engineering · Physics and Astronomy · #Acoustic Wave Resonator Technologies #FOS: Physical sciences #Force Microscopy Techniques and Applications #Materials Science (cond-mat.mtrl-sci) #Mechanical and Optical Resonators #cond-mat.mtrl-sci
paper · pdf · doi:10.48550/arxiv.cond-mat/0512710
4 pages
arxiv created 2005/12/29 · openalex publication_date 2005/12/29 · arxiv updated 2009/12/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
The performance of a wide variety of ultra-sensitive devices employing nanoelectromechanical resonators is determined by their mechanical quality factor, yet energy dissipation in these systems remains poorly understood. Here we develop a comprehensive theory of friction in high frequency resonators caused by the radiation of elastic energy into the support substrate, referred to as clamping loss. The elastic radiation rate is found to be a strong increasing function of resonator frequency, and we argue that this mechanism will play an important role in future microwave-frequency devices.