2005/03/10 by Robert L. Badzey, Guiti Zolfagharkhani, Badzey, Robert L. +6 · 1 citation
Engineering · Physics and Astronomy · #Acoustic Wave Resonator Technologies #Advanced MEMS and NEMS Technologies #FOS: Physical sciences #Mechanical and Optical Resonators #Other Condensed Matter (cond-mat.other) #Quantum Physics (quant-ph) #cond-mat.other #quant-ph
paper · pdf · doi:10.48550/arxiv.cond-mat/0503258
arxiv created 2005/03/10 · openalex publication_date 2005/03/10 · arxiv updated 2009/12/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
We report the realization of a completely controllable high-speed nanomechanical memory element fabricated from single-crystal silicon wafers. This element consists of a doubly-clamped suspended nanomechanical beam structure, which can be made to switch controllably between two stable and distinct states at a single frequency in the megahertz range. Because of their sub-micron size and high normal-mode frequencies, these nanomechanical memory elements offer the potential to rival the current state-of-the-art electronic data storage and processing.