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Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage

2025/03/03 by van Haren, Max, Blanken, Lennart, Classens, Koen +1
#FOS: Electrical engineering #Systems and Control (eess.SY) #electronic engineering #information engineering

paper · doi:10.48550/arxiv.2503.01344

Abstract

Fast-rate models are essential for control design, specifically to address intersample behavior. The aim of this paper is to develop a frequency-domain non-parametric identification technique to estimate fast-rate models of systems that have relevant dynamics and allow for actuation above the Nyquist frequency of a slow-rate output. Examples of such systems include vision-in-the-loop systems. Through local rational models over multiple frequency bands, aliased components are effectively disentangled, particularly for lightly-damped systems. The developed technique accurately determines non-parametric fast-rate models of systems with slow-rate outputs, all within a single identification experiment. Finally, the effectiveness of the technique is demonstrated through experiments conducted on a prototype wafer stage used for semiconductor manufacturing.

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