Oxygen-termination effect on the surface energy dissipation in diamond MEMS

2024/07/09 by Keyun Gu, Zilong Zhang, Guo Chen +5
#Diamond #MEMS #sensors

paper · doi:10.48505/nims.4586

Abstract

Carbon. 225 (2024)

Related

• Low-Energy Dissipation Diamond MEMS
• Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator
• Hydrogen-terminated and oxygen-terminated diamond metal-oxide-semiconductor field-effect transistors
• Sub-nanometer-thick native sp2 carbon on oxidized diamond surfaces
• XPS analysis of molecular contamination and sp2 amorphous carbon on oxidized (100) diamond