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Preparation of Cobalt Thin Films by Sputtering Systems and Its Magnetic Characterization

2009/10/28 by Mustafa Erkovan, Erkovan, Mustafa
Physics and Astronomy · #FOS: Physical sciences #Magnetic properties of thin films #Materials Science (cond-mat.mtrl-sci)

paper · pdf · doi:10.48550/arxiv.0910.5452

openalex publication_date 2009/10/28 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

Different thicknesses of cobalt thin films were growth by magnetron sputtering deposition techniques. The films thicknesses were determinated with X ray Photoelectron Spectroscopy (XPS) and Quartz Crystal Monitoring (QCM). XPS is also used to determinate the films quality. The films magnetic properties were determinated by Ferromagnetic Resonance (FMR) technique.

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