Growth rate and EBSD texture analysis of nitrogen doped diamond films

2008/12/21 by T. Liu, Dierk Raabe, Liu, T. +1
Materials Science · #Diamond and Carbon-based Materials Research

paper · pdf · doi:10.48550/arxiv.0812.4025

Abstract

Chemical-Vapor-Deposition (CVD) diamond films were prepared using a variation of nitrogen addition into the gas source admixture by a direct current CVD method. The influence of nitrogen addition on the crystallographic texture and grain shape evolution in heteroepitaxial polycrystalline diamond films was investigated using high-resolution electron backscattering diffraction (HR-EBSD) and X-ray diffraction (XRD). The analysis reveals that an addition of 1.5% N2 to the CH4 gas flow leads to a strong enhancement of a 110 fiber texture. The phenomenon is discussed in terms of a competitive growth selection mechanism.

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