Sputtering thin films: Materials, applications, challenges and future directions

2024/05/22 by Renuka Garg, Spandana Gonuguntla, Saddam Sk +5 · 24 citations
Engineering · Materials Science · #Electronic and Structural Properties of Oxides #Engineering physics #Materials science #Nanotechnology #Physics #Semiconductor materials and devices #Sputtering #Thin film #ZnO doping and properties

paper · doi:10.1016/j.cis.2024.103203

openalex publication_date 2024/05/22 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/01

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