2013/09/27 by Y. Fan, Fan, Y., Z. Zhang +9
Engineering · Physics and Astronomy · #Acoustic Wave Resonator Technologies #Advanced MEMS and NEMS Technologies #FOS: Physical sciences #Instrumentation and Detectors (physics.ins-det) #Mechanical and Optical Resonators #Optics (physics.optics)
paper · pdf · doi:10.48550/arxiv.1309.7902
openalex publication_date 2013/09/27 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
Analysis of the properties of resonant modes in a reentrant cavity structure comprising of a post and a ring was undertaken and verified experimentally. In particular we show the existence of higher order reentrant cavity modes in such a structure. Results show that the new cavity has two re-entrant modes, one which has a better displacement sensitivity than the single post resonator and the other with a reduced sensitivity. The more sensitive mode is better than the single post resonator by a factor of 2 to 1.5 when the gap spacing is below 100 μm. This type of cavity has the potential to operate as a highly sensitive transducer for a variety of precision measurement applications, in particular applications which require coupling to more than one sensitive transducer mode.