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Electrically Tunable Collective Modes in a MEMS Resonator Array

2000/08/15 by Eyal Buks, E. Buks, M. L. Roukes +2
Engineering · Physics and Astronomy · #Acoustic Wave Resonator Technologies #Advanced MEMS and NEMS Technologies #FOS: Physical sciences #Mechanical and Optical Resonators #Mesoscale and Nanoscale Physics (cond-mat.mes-hall) #cond-mat.mes-hall

paper · pdf · doi:10.48550/arxiv.cond-mat/0008211

RevTec, 12 pages + 5 figures

arxiv created 2000/08/15 · openalex publication_date 2000/08/15 · arxiv updated 2009/11/30 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

Using optical diffraction, we study the mechanical vibrations of an array of micromechanical resonators. Implementing tunable electrostatic coupling between the suspended, doubly-clamped Au beams leads to the formation of a band of collective vibrational modes within these devices. The evolution of these modes with coupling strength is clearly manifested in the optical diffraction pattern of light transmitted through the array. The experimental results are analyzed using a simple model for one-dimensional phonons. These structures offer unique prospects for spectral analysis of complex mechanical stimuli.

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