2020/10/20 by Lily Hallett, Hallett, Lily, Ilya Charaev +11 · 1 citation
Engineering · Materials Science · Physics and Astronomy · #Advanced Fiber Laser Technologies #Diamond and Carbon-based Materials Research #FOS: Physical sciences #Metal and Thin Film Mechanics #Superconductivity (cond-mat.supr-con)
paper · pdf · doi:10.48550/arxiv.2010.10634
openalex publication_date 2020/10/20 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
We present a comprehensive study of molybdenum nitride (MoN) thin film\ndeposition using direct current (DC) reactive magnetron sputtering. We have\ninvestigated the effect of various deposition conditions on the superconducting\nand electrical properties of the films. Furthermore, we have shown that\nmeander-shaped single-photon detectors made from 5 nm MoN films have saturated\nquantum detection efficiency at the telecom wavelength of 1550 nm. Our results\nindicate that MoN may be a material of interest for practical applications of\nlow-temperature superconductors, including single-photon detectors and\ntransition-edge sensors.\n