Ku-Band AlScn-On-Diamond SAW Resonators with Phase Velocity above 8600 m/s

2025/04/28 by Hsu, Tzu-Hsuan, Saha, Kapil, Kramer, Jack +4 · 1 citation
#FOS: Electrical engineering #Signal Processing (eess.SP) #electronic engineering #information engineering

paper · doi:10.48550/arxiv.2504.19936

Abstract

In this work, an Aluminum Scandium Nitride (AlScN) on Diamond Sezawa-mode surface acoustic wave (SAW) platform for RF filtering at Ku-band (12-18 GHz) is demonstrated. Thanks to the high acoustic velocity and low-loss diamond substrate, the prototype resonator at 12.9 GHz achieves a high phase velocity (v_p) of 8671 m/s, a maximum Bode-Q of 408, and coupling coefficient (k_eff²) of 2.1%, outperforming high-velocity substrates such as SiC and sapphire by more than 20% in velocity. Resonators spanning 8-18 GHz are presented. The platform's high power handling above 12.5 dBm is also experimentally validated.

Cited by

• A 5.9 GHz Sezawa SAW Acoustic Delay Line Based on Al0.6Sc0.4N-on-Sapphire with Propagation Q-factor > 3,000

Related

• Near 6 GHz Sezawa Mode Surface Acoustic Wave Resonators using AlScN on SiC
• A 5.9 GHz Sezawa SAW Acoustic Delay Line Based on Al0.6Sc0.4N-on-Sapphire with Propagation Q-factor > 3,000
• Periodically Poled Aluminum Scandium Nitride Bulk Acoustic Wave Resonators and Filters for Communications in the 6G Era
• 62.6 GHz ScAlN Solidly Mounted Acoustic Resonators
• Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz