Tailoring stresses in piezoresistive microcantilevers for enhanced surface stress sensing: insights from topology optimization

2025/01/23 by Chao Zhuang, Kosuke Minami, Kota Shiba +1
#Topology optimization #nanomechanical sensors

paper · doi:10.48505/nims.4867

Abstract

Japanese Journal of Applied Physics. 63 [1] (2024)

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