2024/11/20 by Luca Colombo, Colombo, Luca, Luca Spagnuolo +9
Engineering · Physics and Astronomy · #Acoustic Wave Resonator Technologies #FOS: Electrical engineering #Gyrotron and Vacuum Electronics Research #Microwave Engineering and Waveguides #Systems and Control (eess.SY) #electronic engineering #information engineering
paper · pdf · doi:10.48550/arxiv.2411.13751
openalex publication_date 2024/11/20 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) exploiting a highly-optimized Sezawa mode in 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC) and operating near 16 GHz. Experimental results demonstrate mechanical quality factors (Qm) as high as 380, Bode quality factors (QBode) approaching 500, electromechanical coupling coefficients (kt2) of 4.5%, an overall Figure of Merit (FOM = Qm kt2) exceeding 17, and power handling greater than 20 dBm for devices closely matched to 50 ohms. To the best of the authors' knowledge, S2MRs exhibit the highest Key Performance Indicators (KPIs) among solidly mounted resonators in the Ku band, paving the way for the integration of nanoacoustic devices on fast substrates with high-power electronics, tailored for military and harsh-environment applications.