Production of a large diameter ECR plasma for plasma processing

2004/10/19 by Mayuko Koga, Yasuhiro Hishikawa, Koga, Mayuko +5
Engineering · Physics and Astronomy · #Dust and Plasma Wave Phenomena #FOS: Physical sciences #Metal and Thin Film Mechanics #Plasma Diagnostics and Applications #Plasma Physics (physics.plasm-ph) #physics.plasm-ph

paper · pdf · doi:10.48550/arxiv.physics/0410135

12th International Congress on Plasma Physics, 25-29 October 2004, Nice (France)

arxiv created 2004/10/19 · openalex publication_date 2004/10/19 · arxiv updated 2009/12/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

A large diameter plasma over 300 mm in diameter is produced by electron cyclotron resonance (ECR) discharges using a newly developed large diameter chamber of 400 mm in inner diameter. It is found that the electron temperature decreases as nitrogen gas is added to pure argon plasma, which is considered that nitrogen molecules absorb the electron energy into the vibrational energy and lead to the decrease of the electron temperature. Moreover, it is found that the plasma uniformity is improved by adding nitrogen gas, suggesting that the adjunction of nitrogen gas is effective for producing uniform and low electron temperature plasma.

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