Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler

1995/11/01 by Chin Y. Poon, Bharat Bhushan · 3 citations
Engineering · #Adhesion, Friction, and Surface Interactions #Surface Roughness and Optical Measurements #Advanced Measurement and Metrology Techniques

paper · doi:10.1016/0043-1648(95)06697-7

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