David S. Catherall

1. Isotropic atomic layer etching of MgO-doped lithium niobate using sequential exposures of H₂ and SF₆ plasmas
   2023/10/16 by Ivy I. Chen, Jennifer Solgaard, Chen, Ivy I. +16 · 2 citations
   Engineering · #Advanced Fiber Optic Sensors #FOS: Physical sciences #Materials Science (cond-mat.mtrl-sci) #Mesoscale and Nanoscale Physics (cond-mat.mes-hall) #Optics (physics.optics) #Photonic and Optical Devices #Semiconductor Lasers and Optical Devices