Dries Van Thourhout

1. Polymer assisted area selective ALD of multilayered materials using alkylamine precursors
   2026/01/13 by Nithin Poonkottil, Aditya Chalishazar, Hannes Rijckaert +4 · 1 voice
   Engineering · Materials Science · #Copper Interconnects and Reliability #Optical Coatings and Gratings #Semiconductor materials and devices