Klich, Maximilian
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
2023/03/27 by Katharina Noesges, Noesges, Katharina, Maximilian Klich +13 · 1 citation
Engineering · #Electrostatic Discharge in Electronics #FOS: Physical sciences #Plasma Diagnostics and Applications #Plasma Physics (physics.plasm-ph) #Semiconductor materials and devices