Sarott, Martin F.
- Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS
2023/01/26 by Patidar, Jyotish, Sharma, Amit, Zhuk, Siarhei +7 · 3 citations
#FOS: Physical sciences #Materials Science (cond-mat.mtrl-sci)